MSE 5410

Last Updated

  • Schedule of Classes - June 15, 2016 6:14PM EDT
  • Course Catalog - June 9, 2016 6:15PM EDT

MSE 5410
Nanofabrication for Integrated Circuits

Course information provided by the Courses of Study 2015-2016.

This course will give an introduction to modern nanofabrication technologies with emphasis on integrated circuits manufacturing. Thermal budget, scaling of geometry, pitch and registry and control of parametric yield will be used for integration guidelines. Physical principles and process modeling will be covered in lectures and labs will include a series of fabrication steps of lithography, metallization, plasma etching and annealing to produce semiconductor devices (Schottky diodes, pn junction diodes, MOS capacitors, and MOSFETs). Recent advances in nanofabrication will be briefly reviewed for their possible technology insertion and main integration challenges.

When Offered Spring.

Prerequisites/Corequisites Prerequisites: ECE 3150, CHEM 2090 or CHEM 2070/CHEM 2080.

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Syllabi: none

  •   Regular Academic Session.  Choose one lecture and one discussion. Laboratory optional. Combined with: ECE 4360

  • 3 Credits Graded

  • 18136 MSE 5410   LEC 001

  •  

  • 18137 MSE 5410   DIS 201

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  • 18139 MSE 5410   LAB 402

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    • W

    • Xing, H