ECE 4360

Last Updated

  • Schedule of Classes - June 15, 2016 6:14PM EDT
  • Course Catalog - June 9, 2016 6:15PM EDT

ECE 4360
Nanofabrication for Integrated Circuits

Course information provided by the Courses of Study 2015-2016.

This course will give an introduction to modern nanofabrication technologies with emphasis on integrated circuits manufacturing. Thermal budget, scaling of geometry, pitch and registry and control of parametric yield will be used for integration guidelines. Physical principles and process modeling will be covered in lectures and labs will include a series of fabrication steps of lithography, metallization, plasma etching and annealing to produce semiconductor devices (Schottky diodes, pn junction diodes, MOS capacitors, and MOSFETs). Recent advances in nanofabrication will be briefly reviewed for their possible technology insertion and main integration challenges.

When Offered Spring.

Prerequisites/Corequisites Prerequisite: ECE 3150, CHEM 2090, or CHEM 2070/2080.

View Enrollment Information

Syllabi: none

  •   Regular Academic Session.  Choose one lecture and one discussion. Laboratory optional. Combined with: MSE 5410

  • 3-4 Credits Graded

  • 12228 ECE 4360   LEC 001

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  • Class can be taken for either 3 or 4 credit hours. All students will take the lecture for 3 credits but those who would like an additional 1 credit hour (so total of 4 credits) will need to sign up for one of the OPTIONAL labs. The labs are limited enrollment and will be on a first come, first serve basis. Please check with Professor Xing if you should have any questions. Co-meeting with MSE 5410.

  • 16887 ECE 4360   DIS 201

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  • 12257 ECE 4360   LAB 402

    • W

    • Xing, H

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