ECE 5366

Nanofabrication and Characterization of Electronics Laboratory

Course Description

Course information provided by the 2026-2027 Catalog.

This course provides an introduction to nanofabrication technologies with emphasis on Si-based integrated circuits manufacturing as well as modern electronics based on GaN, 2D materials etc. The lab, primarily taught in the Cornell Teaching Cleanroom, includes basic fabrication steps of lithography, metallization, plasma etching and annealing. A series of devices will be fabricated: solar cells, MOS capacitors and transistors, 2D transistors, GaN HEMTs and LEDs.

Prerequisites background equivalent to: MSE 5410.

Last 4 Terms Offered 2026FA, 2026SP, 2025FA, 2025SP

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