- Schedule of Classes - November 22, 2017 7:14PM EST
- Course Catalog - November 22, 2017 7:15PM EST
Course information provided by the Courses of Study 2017-2018.
This course will give an introduction to modern nanofabrication technologies with emphasis on integrated circuits manufacturing. Thermal budget, scaling of geometry, pitch and registry and control of parametric yield will be used for integration guidelines. Physical principles and process modeling will be covered in lectures and labs will include a series of fabrication steps of lithography, metallization, plasma etching and annealing to produce semiconductor devices (Schottky diodes, pn junction diodes, MOS capacitors, and MOSFETs). Recent advances in nanofabrication will be briefly reviewed for their possible technology insertion and main integration challenges.
When Offered Spring.
Prerequisites/Corequisites Prerequisite: ECE 3150, CHEM 2090, or CHEM 2070/2080.
Choose one lecture and one discussion. Combined with: MSE 5410
Credits and Grading Basis
3 Credits Graded(Letter grades only)
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