ECE 4320

MicroElectro Mechanical Systems

Course Description

Course information provided by the Courses of Study 2015-2016.

Introduction to MEMS: microsensors, microactuators, and microrobots. Fundamentals of MEMS, including materials, microstructures, devices and simple microelectro-mechanical systems, scaling electronic and mechanical systems to the micrometer/nm-scale, material issues, and the integration of micromechanical structures and actuators with simple electronics. This is an interdisciplinary course drawing content from mechanics, materials, structures, electronic systems, and the disciplines of physics and chemistry.

When Offered Spring.

Prerequisites/Corequisites Prerequisite: ECE 3150 or permission of instructor.

• Be able to use point fabrication procedures into practical process integration.
• Be able to use electrical measurements for MEMS mechanical structures.
• Understand sufficient beam and plate mechanics to accomplish mechanical design aspects.
• Quantitatively understand the limitation of surface micromachining and bulk micromachining in terms of structure and functionality.
• Be able to estimate the force magnitude and power consumption in various actuation schemes, such as electrostatic, thermal, piezoelectric and magnetic.

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