MAE 4320

Last Updated

  • Schedule of Classes - June 22, 2015 4:42PM EDT
  • Course Catalog - June 11, 2015 6:21PM EDT

MAE 4320
MicroElectro Mechanical Systems

Course information provided by the Courses of Study 2014-2015.

Introduction to MEMS: microsensors, microactuators, and microrobots. Fundamentals of MEMS, including materials, microstructures, devices and simple microelectro-mechanical systems, scaling electronic and mechanical systems to the micrometer/nm-scale, material issues, and the integration of micromechanical structures and actuators with simple electronics. This is an interdisciplinary course drawing content from mechanics, materials, structures, electronic systems, and the disciplines of physics and chemistry.

When Offered Spring.

Prerequisites/Corequisites Prerequisite: ECE 3150, AEP 3630, or MAE 3780 or permission of instructor.

Outcomes
  • Be able to use point fabrication procedures into practical process integration.
  • Be able to use electrical measurements for MEMS mechanical structures.
  • Understand sufficient beam and plate mechanics to accomplish mechanical design aspects.
  • Quantitatively understand the limitation of surface micromachining and bulk micromachining in terms of structure and functionality.
  • Be able to estimate the force magnitude and power consumption in various actuation schemes, such as electrostatic, thermal, piezoelectric and magnetic.

View Enrollment Information

Syllabi: none

  •   Regular Academic Session.  Choose one lecture, one discussion, and one laboratory. Combined with: ECE 4320

  • 4 Credits Graded

  • 12619 MAE 4320   LEC 001

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  • 12621 MAE 4320   DIS 201

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  • 12620 MAE 4320   LAB 401

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    • Lal, A