MSE 5411
Last Updated
- Schedule of Classes - April 13, 2026 10:10AM EDT
Classes
MSE 5411
Course Description
Course information provided by the 2026-2027 Catalog.
This course provides an introduction to nanofabrication technologies with emphasis on Si-based integrated circuits manufacturing as well as modern electronics based on GaN, 2D materials etc. The lab, primarily taught in the Cornell Teaching Cleanroom, includes basic fabrication steps of lithography, metallization, plasma etching and annealing. A series of devices will be fabricated: solar cells, MOS capacitors and transistors, 2D transistors, GaN HEMTs and LEDs.
Prerequisites or corequisite: ECE 4360/MSE 5410, AEP 6620 or equivalents.
Last 4 Terms Offered 2026SP, 2025FA, 2025SP, 2024FA
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Credits and Grading Basis
1 Credit Graded(Letter grades only)
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Credits and Grading Basis
1 Credit Graded(Letter grades only)
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Class Number & Section Details
-
Meeting Pattern
- T
- Aug 24 - Dec 7, 2026
Instructors
Xing, H
-
Additional Information
Instruction Mode: In Person
Must attend a meeting for lab safety and policies in the 1st week of classes, which can also be completed virtually prior to participating in the first Lab Module in the 2nd week.
-
Credits and Grading Basis
1 Credit Graded(Letter grades only)
-
Class Number & Section Details
-
Meeting Pattern
- W
- Aug 24 - Dec 7, 2026
Instructors
Xing, H
-
Additional Information
Instruction Mode: In Person
Must attend a meeting for lab safety and policies in the 1st week of classes, which can also be completed virtually prior to participating in the first Lab Module in the 2nd week.
-
Credits and Grading Basis
1 Credit Graded(Letter grades only)
-
Class Number & Section Details
-
Meeting Pattern
- R
- Aug 24 - Dec 7, 2026
Instructors
Xing, H
-
Additional Information
Instruction Mode: In Person
Must attend a meeting for lab safety and policies in the 1st week of classes, which can also be completed virtually prior to participating in the first Lab Module in the 2nd week.
-
Credits and Grading Basis
1 Credit Graded(Letter grades only)
-
Class Number & Section Details
-
Meeting Pattern
- F
- Aug 24 - Dec 7, 2026
Instructors
Xing, H
-
Additional Information
Instruction Mode: In Person
Must attend a meeting for lab safety and policies in the 1st week of classes, which can also be completed virtually prior to participating in the first Lab Module in the 2nd week.
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