MSE 5411

MSE 5411

Course information provided by the 2026-2027 Catalog.

This course provides an introduction to nanofabrication technologies with emphasis on Si-based integrated circuits manufacturing as well as modern electronics based on GaN, 2D materials etc. The lab, primarily taught in the Cornell Teaching Cleanroom, includes basic fabrication steps of lithography, metallization, plasma etching and annealing. A series of devices will be fabricated: solar cells, MOS capacitors and transistors, 2D transistors, GaN HEMTs and LEDs.


Prerequisites or corequisite: ECE 4360/MSE 5410, AEP 6620 or equivalents.

Last 4 Terms Offered 2026SP, 2025FA, 2025SP, 2024FA

View Enrollment Information

Syllabi: none
  •   Regular Academic Session.  Combined with: ECE 4361ECE 5366

  • 1 Credit Graded

  • 14530 MSE 5411   LAB 401

    • M
    • Aug 24 - Dec 7, 2026
    • Xing, H

  • Instruction Mode: In Person

Syllabi: none
  •   Regular Academic Session.  Combined with: ECE 4361ECE 5366

  • 1 Credit Graded

  • 14531 MSE 5411   LAB 402

    • T
    • Aug 24 - Dec 7, 2026
    • Xing, H

  • Instruction Mode: In Person

    Must attend a meeting for lab safety and policies in the 1st week of classes, which can also be completed virtually prior to participating in the first Lab Module in the 2nd week.

Syllabi: none
  •   Regular Academic Session.  Combined with: ECE 4361ECE 5366

  • 1 Credit Graded

  • 14532 MSE 5411   LAB 403

    • W
    • Aug 24 - Dec 7, 2026
    • Xing, H

  • Instruction Mode: In Person

    Must attend a meeting for lab safety and policies in the 1st week of classes, which can also be completed virtually prior to participating in the first Lab Module in the 2nd week.

Syllabi: none
  •   Regular Academic Session.  Combined with: ECE 4361ECE 5366

  • 1 Credit Graded

  • 14533 MSE 5411   LAB 404

    • R
    • Aug 24 - Dec 7, 2026
    • Xing, H

  • Instruction Mode: In Person

    Must attend a meeting for lab safety and policies in the 1st week of classes, which can also be completed virtually prior to participating in the first Lab Module in the 2nd week.

Syllabi: none
  •   Regular Academic Session.  Combined with: ECE 4361ECE 5366

  • 1 Credit Graded

  • 14534 MSE 5411   LAB 405

    • F
    • Aug 24 - Dec 7, 2026
    • Xing, H

  • Instruction Mode: In Person

    Must attend a meeting for lab safety and policies in the 1st week of classes, which can also be completed virtually prior to participating in the first Lab Module in the 2nd week.